In low pressure plasma technology a stable and effective plasma is created by an electromagnetic
discharge of a process gas at low pressure (and at low temperature). The process gas will be partially
decomposed into radicals, electrons, photons and atoms, and will also be partially ionized. These
reactive species interact with all exposed surfaces of the material. This interaction is both chemical
and physical in nature. When a material has inner surfaces, the plasma will also penetrate that
structure to interact with these inner surfaces.
Depending on the chemistry, different types of processes are performed. When pure gases are used,
materials are cleaned and/or activated, and PCBs can be etched. When using monomers, they will
polymerize on the substrate into a nanocoating. The properties of the nanocoating depend on the
monomer used.
